垂直式微小探針研製與測試機開發

執行期限:民國93111日至民國941031

人:施勝雄

研究人員:賴文雄、林忠義


摘要

本研究使用微機電製程(MEMS)搭配微電鑄(Micro Electroforming)技術製作垂直式彈簧探針,使其具有最大的柔順度,可應用在晶圓級探針卡。其特徵為使用半導體微影技術搭配厚光阻,再使用微電鑄技術的製作方式,可批量生產高精度探針。探針外型設計使用有限元素分析(FEA)軟體COSMOS模擬不同型態探針的應力與變形,以縮短開發時程。合金電鑄設備從設計到加工獨立完成,技術自組性高、關鍵技術能夠自行掌握。目前可以製造鎳鐵與鎳鈷合金電鑄探針。

    探針性質測試也是重要的一環,尤其是探針的楊氏係數、硬度、最大耐電流、疲勞壽命及阻值等,本計劃皆已完成量測工作。其中我們自行組裝了一台複合式量測設備,其中包括的控制電路採用PIC單晶片,資訊透過LCD顯示,可以單機獨立自動化操作。功能上包括「設定百萬次往復運動次數」、「偵測探針接觸」與「RS232電腦溝通」等功能。此外,不需要改變硬體情況下,變更韌體即可改變測試機台的功能,如量測最大耐電流、彈簧常數等。探針疲勞測試機往復動作是使用音圈馬達來取代傳統機械式往復機構設計,具有更高的反應速度,降低測試時間。另外,搭配力量感測器於探針接觸面上,當探針發生接觸時,可進行探針反作用力的檢測,求得位移與反作用力的關係。


ABSTRACT

This project aims to combine MEMS process with micro electroforming technology to fabricate vertical spring-probe, which can be applied to wafer level probe card due to its large flexibility. The features of this kind of probe card include using thick layer PR photolithography process, applying micro electroforming process and producing a large number of probe cards with large accuracy at the same time. We use the FEA software, COSMOS, to simulate different kinds of stress and deformation under different contours of probes so that we can reduce the design time. Both design and fabrication of the alloy electroforming facility are also finished by us. So far we have successfully finished producing Ni-Fe and Ni-Co probes.

 

        The required specifications of the probe have been measured in this study, especially the probe’s Young’s module, hardness, maximum current, life time and resistivity. We assemble a complex measurement that include of PIC microchip to build the controller circuit of this testing equipment that can make the related testing information display by the LCD screen and can be operated automatically as well. The other advantages of this testing machine include “Set reciprocal motion of million times”, “Contact with tested probes”, “Communicate with RS232 interface” etc. Furthermore, we can change any functions of the testing equipment by altering firmware without changing any hardware, for example, it can measure the probe’s maximum current and spring constant. This testing machine achieves high speed response with low testing time because we use voice coil motor to substitute for traditional mechanical design in the aspect of reciprocal mechanism. In addition, we add on a force sensor to probe contact surface such that the probe reacting force can be obtained when the probe contacts with surface.