無線生醫感測網路晶片系統

執行期限:950801日至960731

人:張培仁 教授  國立台灣大學應用力學研究所

共同主持人:呂學士 教授、黃榮堂 教授、林佑昇 教授、施文彬 教授

計畫參與人員:孫美芳、方啟銘


摘要

概觀此計畫第二年研究之期中綜合成果,其符合今年預計規劃進度,其中成果包含子計畫一以台積電標準CMOS 0.35-um製程實現一個整合晶片包含8位元RISC結構微控制器及10位元漸近逼近式類比數位轉換器;子計畫二包含局部圖案接地遮蔽 (Partial PGS) 之概念應用於改善射頻單晶變壓器及3.1-10.6 GHz CMOS UWB 低雜訊放大器元件表現、使用TSMC 0.18 mm CMOS技術設計一個增益S21>10 dB32-GHz LNA等;子計畫三包含台積電0.35um製程高頻電晶體大訊號模型之建立、功率放大器之多頻設計、高頻微機電元件傳送-接收開關、晶片整合式智慧型碎形天線、微機電式高變化率可變電容等;子計畫四以台積電提供之標準CMOS 0.35μm 2P4M製程配合MEMS微加工之後續製程處理來製作微型陀螺儀,以及新式側向型電容式微陀螺儀與感測電路之設計;子計畫五包含以台積電所提供標準CMOS 0.35μm 2P4M製程配合後MEMS製程來進行微波微機電開關之設計模擬與製作,以及薄膜體聲波濾波器之設計與製作。總結前述之研究成果,對於無線生醫網路感測單晶片系統之研製已向前邁進一小步。

關鍵詞:積體電路、微機電、金氧半導體、無線通訊、生醫感測器


ABSTRACT

This year, the expected milestones of this joint project have been achieved approximately on schedule. In Subproject 1, a integral chip include a 8 bits RSIC Controller and a 10 bits successive approximation Analog to Digital Converter in TSMC standard CMOS 0.35-mm technology is presented in this project. In Subproject 2, we have also proposed the concept of “partial PGS” to improve the performance of RF passive devices, such as RF monolithic transformers and a 3.1-10.6 GHz CMOS UWB LNA. Besides, a low-power-consumption (26.93mW) 32-GHz (Ka-band) LNA using standard 0.18-mm CMOS technology is reported. In Subproject 3, we have realized extracted large signal model of high frequency transistor based on TSMC 0.35mm standard CMOS process, design of multi-band power amplifier, high frequency MEMS switch, studied smart fractal antenna integrated on a chip, and MEMS variable capacitor. In Subproject 4, we have fabricated a micro gyroscope based on 0.35-mm 2P4M CMOS process and MEMS post-process. Besides, the new, capacitive, lateral micro gyroscope is designed. In Subproject 5, RF MEMS switch is developed by 0.35-mm 2P4M CMOS process and MEMS post-process. Besides, Film bulk acoustic wave filters (FBAW filters) are successfully designed and fabricated using MEMS process.

Key WordsIntegrated CircuitMEMSCMOSWirelessBiomedical Sensor