生物微粒檢測計數裝置

Particle Counting Device

指導教授 : 黃榮堂   研究生 : 賴裕仁  機電整合研究所 92年


摘要

 本研究研發出一生物微粒檢測計數裝置,其可藉由介電力的作用操控微粒子或細胞之行為,並使其通過檢測離子通道。微粒通過離子通道時會造成孔洞阻塞,因此兩端阻值升高,藉由量測離子通道兩端之離子流變化可檢測出微粒數量。

介電力的作用是透過特殊設計的電極外型及位置分佈,產生不均勻電場使得微粒子因極化程度不同而產生介電力,研究中透過數值模擬軟體CFDRC 模擬電極外型和電場分佈。晶片基材採顯微鏡之載玻片,透過微機電製程,將金屬蒸鍍於玻璃基材上,再利用微影蝕刻製作微電極。微流道部份採厚光阻為材料,再以光微影技術完成流道。檢測之離子通道則委託國科會精密儀器中心代工。

研究中透過介電力之作用,先將欲檢側之微粒分選,並集中後依序遷引至離子通道,利用微電流計量測離子流變化,經由變化次數可成功檢測出特定微粒子數量。

關鍵詞:細胞計數、生物晶片、微機電、介電力、離子通道

ABSTRACT

 The research disclosed a particle-counting chip which can reliably count particles in the fixed quantity of sample solution. Let sample drop in the chip inlet, then use dielectrophoresis (DEP) force produced by separation device on the chip to separate and move specific particles to micro-pore. When the particles pass through the micro-pore one by one, recording the numbers of ion current reduction events can correctly count the specific particles in the fixed volume of sample solution.

In order to increase practicability of experiments, we designed the shape of electrode by using CFD-RC simulation software to simulate electro-field distribution, and followed the result of simulation to design electrode patterns. The substrate is use the microscope slides (75*38*1mm). Aluminum (6000A) is thermally evaporated an electrode pattern onto the glass slide, then employed photolithography to build figure of photoresist, using the photoresist as barrier mask for wet etching.

We believe for different particle a different separation electro-field pattern can be employed accordingly, therefore each independent channel can synchronously proceed the counting of the same or different particle; the disclosed technology can achieve the purpose of particle count.

Keywords:cell counting , Bio Chip, MEMS,dielectrophoresis, Ion channel