應用合金電鑄技術於微機電垂直式探針卡研究與製作

The Research and Fabrication of MEMS Vertical Probe Card by Using Alloy Electroforming Technology

指導教授 : 黃榮堂 、施勝雄 研究生 : 賴文雄  機電整合研究所 92年


摘要

  本論文使用微機電製程(MEMS)搭配微電鑄(Micro Electroforming)技術製作垂直式彈簧探針,使其具有最大的柔順度,可應用在晶圓級探針卡。其特徵為使用半導體微影技術搭配厚光阻,再使用微電鑄技術的製作方式,可批量生產高精度探針。探針外型設計使用有限元素分析(FEA)軟體COSMOS模擬不同型態探針的應力與變形,以縮短開發時程。合金電鑄設備從設計到加工獨立完成,技術自組性高、關鍵技術能夠自行掌握。目前可以製造鎳鐵與鎳鈷合金電鑄探針。

探針測試也是重要的一環,因此必須開發探針測試機台,以便進行探針疲勞測試。測試設備控制電路採用PIC單晶片,資訊透過LCD顯示,可以單機獨立自動化操作。功能上包括「設定百萬次往復運動次數」、「偵測探針接觸」與「RS232電腦溝通」等功能。此外,不需要改變硬體情況下,變更韌體即可改變測試機台的功能,順應不同場合的需求。探針疲勞測試機往復動作是使用音圈馬達來取代傳統機械式往復機構設計,具有更高的反應速度,降低測試時間。另外,放置壓力感測器於音圈馬達上方,當探針發生接觸時,可進行探針反作用力的檢測,求得位移與反作用力的關係。

關鍵詞:微機電、合金電鑄、探針測試機、音圈馬達

ABSTRACT

  This paper combines MEMS process with micro electroforming technology to fabricate vertical spring-probe, which can be applied to wafer level probe card due to its large flexibility. The feature of this kind of probe card include using thick layer PR photolithography process, applying micro electrofrming process and producing a large number of probe cards with large accuracy at the same time. We use the FEA software, COSMOS, to simulate different kinds of stree and deformation under different contours of probes so that we can reduce the design time. Both design and fabrication of the alloy electroforming facility are also finish by ourselves, and it has two advantages as high assembly technology and key point controlled by ourselves. So far we have successfully finished producing Ni-Fe and Ni-Co probes.

The probes testing is another key point in this study, so we have no choice but to develop a testing equipment for probes in order to perform fatigue testing of probes. We take advantage of the conception of PIC microchip to build the controller circuit of this testing equipment that can make the related testing information display by the LCD screen and can be operated automatically as well. The other advanges of this testing machine include “Set reciprocal motion of millon times”,”Contact wth tested probes”,”Communicate with RS232 computer” etc. Furthermore, we can change any functions of the testing equipment by altering firmware without changing any hardware, so as to cater for different requirements. This testing machine link up high speed response with low testing time because we use voice coil motor to substitute for tranditional mechanical design in the aspect of reciprocal mechanism. Besides, Build pressure sensor on the top of voil coil motor while pressure sensor is contacted with its surface, reacting force can be examined to get the result of relations between displacement and reacting force.

Keywords:MEMS, Alloy Electroforming, Probe Testing Meachine, Voice Coil Motor