結合可迴授接觸力感測器之微機電探針卡的分析與設計

Analysis and Design of MEMS Probe Cards with Feedback Contact force Sensor

指導教授 : 黃榮堂    研究生 : 嚴國澍  機電整合研究所 91年


摘要

  本論文乃使用微機電製程製作垂直式彈簧探針,使其具有較大的柔順度,其特徵為使用多層式厚光阻電鍍,微裝配及陽極結合,可容易製作精密探針卡,使得高價的精密探針卡可因而降低其價格,減少人為裝配技術的依賴。探針陣列與印刷電路板之間的空間轉換器,乃是利用球狀網格陣列(BGA)方式達成,簡易又成本低廉,再者若將安置探針的基板設計成含有可迴授接觸力感測器的薄膜,則可以利用接觸力回饋,來達到主動式探針接觸力的閉迴路偵測。
本文透過有限元素分析軟體ANSYS5.5.1和COSMOS分別做探針卡結構中探針的形狀最佳化設計及模擬可迴授接觸力感測器的設計,建立文獻中測試用探針的模型,透過模擬了解探針受力及變形的情形,還有了解各種不同的薄膜型式,如一穴一針、一針二穴或一穴多針,薄膜受力變形後其所安置的壓阻的應力變化情形,評估各種接觸力感測器的性能以作為探針底下的接觸力感測器的設計參考。

ABSTRACT

  This study uses FEA simulation software, COSMOS, to design and analyze a novel probe card with contact force sensors for measuring the contact force of each probe. The main idea of using a contact force sensor to feedback the contact quality of each probe is to maintain the constant resistance for on-wafer testing, or to know if the co-planarity of the probe array is enough, or to estimate the weariness of each probe. The simulation is to understands effects of contact forces on shape change of the probe, when the probe touches the test wafer or dies, Moreover, the contact force vs. probe overdrive is analyzed analytically and numerically. The dependence of piezoresistance sensitivity on the design of membrane geometric dimension and topology are also discussed through simulation.

Keyword:probe card, overdrive, piezoresistor, contact force sensor